This paper reports the design, simulation and experimental study of a linear magnetic\nmicroactuator for portable electronic equipment and microsatellite high resolution remote sensing\ntechnology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a\nmicrospring. Its bistable mechanism can be kept without current by external permanent magnetic\nforce, and can be switched by the bidirectional electromagnetic force. The linearization and threshold\nof the bistable mechanism was optimized by topology structure design of the microspring. The linear\nmicroactuator was then fabricated based on non-silicon technology and the prototype was tested.\nThe testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms,\nwhich verified the simulation and analysis.
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